Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter
نویسندگان
چکیده
منابع مشابه
Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter.
We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previo...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2015
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.40.003556